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Method for forming metal silicide by laser irradiation

US 6,316,357 B1 · Assignee: Industrial Technology Research Institute · Inventors: Lin; Kang-Cheng et al.

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Listed from its USPTO record in Patent Yard's full-term archive. Its claims, description and drawings are in the USPTO PDF and on Google Patents, and the Claude kit works from them.

Why it's free to use

  • Filed October 8, 1997. A US utility patent lasts 20 years from filing, so its term ended October 8, 2017.
  • Patents filed before May 29, 2000 can't get a term adjustment for USPTO delays, and any other extension is capped at five years, so it can't still be in force.
  • We haven't checked its US family, and a later related patent could still be in force. We check US rights only.
FiledOctober 8, 1997
GrantedNovember 13, 2001
Term endedOctober 8, 2017
Application number08/947381
Classification (CPC)H10D30/0212 +2 more
Length9 pages

Timeline

Timeline From USPTO dates

1998200020022004200620082010201220142016Application filedOct 8, 1997Patent grantedNov 13, 2001Term endedOct 8, 2017

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