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Vertically oriented structure with sloped opening and method for etching

US 6,010,930 A · Assignee: Micron Technology Inc. · Inventors: Keller; David J. et al.

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Listed from its USPTO record in Patent Yard's full-term archive. Its claims, description and drawings are in the USPTO PDF and on Google Patents, and the Claude kit works from them.

Why it's free to use

  • Filed September 11, 1997. A US utility patent lasts 20 years from filing, so its term ended September 11, 2017.
  • Patents filed before May 29, 2000 can't get a term adjustment for USPTO delays, and any other extension is capped at five years, so it can't still be in force.
  • We haven't checked its US family, and a later related patent could still be in force. We check US rights only.
FiledSeptember 11, 1997
GrantedJanuary 4, 2000
Term endedSeptember 11, 2017
Application number08/928041
Classification (CPC)H10B12/033 +2 more
Length11 pages

Timeline

Timeline From USPTO dates

1998200020022004200620082010201220142016Application filedSep 11, 1997Patent grantedJan 4, 2000Term endedSep 11, 2017

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