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Membrane and mask, and exposure apparatus using the mask, and device producing method using the mask

US 5,882,826 A · Assignee: Canon Kabushiki Kaisha · Inventors: Kato; Hideo et al.

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Overview

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Listed from its USPTO record in Patent Yard's full-term archive. Its claims, description and drawings are in the USPTO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed July 16, 1996. A US utility patent lasts 20 years from filing, so its term ended July 16, 2016.
  • Patents filed before May 29, 2000 can't get a term adjustment for USPTO delays, and any other extension is capped at five years, so it can't still be in force.
  • We haven't checked its US family, and a later related patent could still be in force. We check US rights only.
FiledJuly 16, 1996
GrantedMarch 16, 1999
Term endedJuly 16, 2016
Application number08/680796
Classification (CPC)G03F1/22
Length11 pages

Timeline

Timeline From USPTO dates

1997199920012003200520072009201120132015Application filedJuly 16, 1996Patent grantedMarch 16, 1999Term endedJuly 16, 2016

Sources & verification

Official USPTO records

Full published documentText and every drawing sheet as a PDF.USPTOFile historyStatus, office actions, notices, fee records and petitions.USPTO Patent CenterPatent Public Search recordSearchable full text and bibliographic data.USPTO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comJustia PatentsFull text, claims and classification.patents.justia.comFreePatentsOnlineFull text and PDF.freepatentsonline.comEspacenetForeign family and legal status.European Patent Office

Everything on this page comes from the USPTO record linked above.