Analyzing method and apparatus for minute foreign substances, and manufacturing methods for manufacturing semiconductor device and liquid crystal display device using the same

US 5,877,035 A · Assignee: Mitsubishi Denki Kabushiki Kaisha · Inventors: Fujino; Naohiko et al.

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Listed from its USPTO record in Patent Yard's full-term archive. Its claims, description and drawings are in the USPTO PDF and on Google Patents, and the Claude kit works from them.

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Filed February 12, 1996. A US utility patent lasts 20 years from filing, so its term ended February 12, 2016.
Patents filed before May 29, 2000 can't get a term adjustment for USPTO delays, and any other extension is capped at five years, so it can't still be in force.
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FiledFebruary 12, 1996

GrantedMarch 2, 1999

Term endedFebruary 12, 2016

Application number08/600141

Classification (CPC)G01N21/94 +2 more

Length25 pages

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Official USPTO records

Full published documentText and every drawing sheet as a PDF.USPTO File historyStatus, office actions, notices, fee records and petitions.USPTO Patent Center Patent Public Search recordSearchable full text and bibliographic data.USPTO

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