Likely abandonedArchiveSolo inventor
Substrate for high-resolution electronic lithography and corresponding lithography method
US 2015/0286140 A1 · Inventors: Imbert; Jean-Louis et al.
Overview
The published document from the USPTO: abstract, claims, description and drawings. Open it full size
Read the whole patent
Listed from its USPTO record in Patent Yard's full-term archive. Its claims, description and drawings are in the USPTO PDF and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Published October 8, 2015, and no patent has issued anywhere in its US family since.
- Nothing has been filed in its family for more than seven years, so it is very unlikely to still be pending.
- This status is inferred from USPTO records. Confirm it on Patent Center before relying on it.
FiledAugust 2, 2013
PublishedOctober 8, 2015
StatusAbandoned (inferred)
Application number14/420291
Classification (CPC)G03F7/11 +2 more
Length8 pages
Timeline
Timeline From USPTO dates
Sources & verification
Official USPTO records
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Everything on this page comes from the USPTO record linked above.