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Solution based zirconium precursors for atomic layer deposition

US 2010/0290945 A1 · Inventors: MA; Ce et al.

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Listed from its USPTO record in Patent Yard's full-term archive. Its claims, description and drawings are in the USPTO PDF and on Google Patents, and the Claude kit works from them.

Why it's free to use

  • Published November 18, 2010, and no patent has issued anywhere in its US family since.
  • Nothing has been filed in its family for more than seven years, so it is very unlikely to still be pending.
  • This status is inferred from USPTO records. Confirm it on Patent Center before relying on it.
FiledMay 13, 2009
PublishedNovember 18, 2010
StatusAbandoned (inferred)
Application number12/465085
Classification (CPC)C07F17/00 +2 more
Length4 pages

Timeline

Timeline From USPTO dates

2010Application filedMay 13, 2009Application publishedNov 18, 2010

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