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Vapor deposition source, a vapor deposition apparatus and a method for forming an organic thin film

US 2010/0015361 A1 · Assignee: ULVAC, INC. · Inventors: NEGISHI; Toshio

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Listed from its USPTO record in Patent Yard's full-term archive. Its claims, description and drawings are in the USPTO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Published January 21, 2010, and no patent has issued anywhere in its US family since.
  • Nothing has been filed in its family for more than seven years, so it is very unlikely to still be pending.
  • This status is inferred from USPTO records. Confirm it on Patent Center before relying on it.
FiledAugust 26, 2009
PublishedJanuary 21, 2010
StatusAbandoned (inferred)
Application number12/547676
Classification (CPC)C23C14/12 +2 more
Length12 pages

Timeline

Timeline From USPTO dates

2010Application filedAug 26, 2009Application publishedJan 21, 2010

Sources & verification

Official USPTO records

Full published documentText and every drawing sheet as a PDF.USPTOFile historyStatus, office actions, notices, fee records and petitions.USPTO Patent CenterPatent Public Search recordSearchable full text and bibliographic data.USPTO

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