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Method for simulatenously producing multiple wafers during a single epitaxial growth run and semiconductor structure grown thereby

US 2009/0286331 A2 · Assignee: Freiberger Compound Materials GMBH · Inventors: Dmitriev; Vladimir et al.

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Listed from its USPTO record in Patent Yard's full-term archive. Its claims, description and drawings are in the USPTO PDF and on Google Patents, and the Claude kit works from them.

Why it's free to use

  • Published November 19, 2009, and no patent has issued anywhere in its US family since.
  • Nothing has been filed in its family for more than seven years, so it is very unlikely to still be pending.
  • This status is inferred from USPTO records. Confirm it on Patent Center before relying on it.
FiledNovember 10, 2008
PublishedNovember 19, 2009
StatusAbandoned (inferred)
Application number12/267711
Classification (CPC)C30B25/00 +2 more
Length32 pages

Timeline

Timeline From USPTO dates

2009Application filedNov 10, 2008Application publishedNov 19, 2009

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