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Expired European patentEurope

Method for removing particles from a semiconductor surface

EP 1869697 B1 · Applicant: Lam Research AG

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Overview

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed March 23, 2006 and granted June 29, 2011. A European patent lasts at most 20 years from filing, so its term ended March 23, 2026.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledMarch 23, 2006
PublishedDecember 26, 2007
GrantedJune 29, 2011
Term endedMarch 23, 2026
Application numberEP 06725265
Classification (CPC)C11D3/08 +2 more

Timeline

Timeline From EPO dates

2007200920112013201520172019202120232025Application filedMarch 23, 2006PublishedDec 26, 2007Patent grantedJune 29, 2011Term endedMarch 23, 2026

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

Everything on this page comes from the EPO record linked above. EPO data used under CC BY 4.0.