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Expired European patentEurope

6 KHz AND ABOVE GAS DISCHARGE LASER SYSTEM

EP 1867015 B1 · Applicant: Cymer, Inc.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

Why it's free to use

  • Filed March 27, 2006 and granted November 21, 2012. A European patent lasts at most 20 years from filing, so its term ended March 27, 2026.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledMarch 27, 2006
PublishedDecember 19, 2007
GrantedNovember 21, 2012
Term endedMarch 27, 2026
Application numberEP 06748829
Classification (CPC)H01F3/10 +2 more

Timeline

Timeline From EPO dates

2007200920112013201520172019202120232025Application filedMarch 27, 2006PublishedDec 19, 2007Patent grantedNov 21, 2012Term endedMarch 27, 2026

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