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Expired European patentEurope

Reflective photomask blank, reflective photomask, and method for manufacturing semiconductor device using same

EP 1833080 B1 · Applicant: Toppan Printing Co., Ltd.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

Why it's free to use

  • Filed December 6, 2005 and granted September 22, 2010. A European patent lasts at most 20 years from filing, so its term ended December 6, 2025.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledDecember 6, 2005
PublishedSeptember 12, 2007
GrantedSeptember 22, 2010
Term endedDecember 6, 2025
Application numberEP 05814171
Classification (CPC)G03F1/22 +2 more

Timeline

Timeline From EPO dates

2006200820102012201420162018202020222024Application filedDec 6, 2005PublishedSep 12, 2007Patent grantedSep 22, 2010Term endedDec 6, 2025

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