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Expired European patentEurope

Charged particle beamlet exposure system

EP 1830384 B1 · Applicant: MAPPER LITHOGRAPHY IP B.V.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed May 27, 2004 and granted September 14, 2011. A European patent lasts at most 20 years from filing, so its term ended May 27, 2024.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledMay 27, 2004
PublishedSeptember 5, 2007
GrantedSeptember 14, 2011
Term endedMay 27, 2024
Application numberEP 07075242
Classification (CPC)H01J37/3007 +2 more

Timeline

Timeline From EPO dates

2005200720092011201320152017201920212023Application filedMay 27, 2004PublishedSep 5, 2007Patent grantedSep 14, 2011Term endedMay 27, 2024

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

Everything on this page comes from the EPO record linked above. EPO data used under CC BY 4.0.