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Expired European patentEurope

Lithographic apparatus and device manufacturing method

EP 1821150 B1 · Applicant: ASML Netherlands B.V.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed December 1, 2005 and granted August 20, 2008. A European patent lasts at most 20 years from filing, so its term ended December 1, 2025.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledDecember 1, 2005
PublishedAugust 22, 2007
GrantedAugust 20, 2008
Term endedDecember 1, 2025
Application numberEP 07007495
Classification (CPC)G03F7/707 +2 more

Timeline

Timeline From EPO dates

2006200820102012201420162018202020222024Application filedDec 1, 2005PublishedAug 22, 2007Patent grantedAug 20, 2008Term endedDec 1, 2025

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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