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Expired European patentEurope

EUV-lithographic projection apparatus comprising an optical element with a capping layer

EP 1801658 B1 · Applicant: ASML Netherlands B.V.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

Why it's free to use

  • Filed June 28, 2000 and granted June 15, 2016. A European patent lasts at most 20 years from filing, so its term ended June 28, 2020.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by December 28, 2025.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledJune 28, 2000
PublishedJune 27, 2007
GrantedJune 15, 2016
Term endedJune 28, 2020
Application numberEP 07005669
Classification (CPC)G03F7/70058 +2 more

Timeline

Timeline From EPO dates

2001200320052007200920112013201520172019Application filedJune 28, 2000PublishedJune 27, 2007Patent grantedJune 15, 2016Term endedJune 28, 2020

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