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Expired European patentEurope

Fabrication mehod for photomask, fabrication method for device and monitoring method for photomask

EP 1798595 B1 · Applicant: Fujitsu Ltd.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

Why it's free to use

  • Filed March 23, 2006 and granted May 14, 2008. A European patent lasts at most 20 years from filing, so its term ended March 23, 2026.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledMarch 23, 2006
PublishedJune 20, 2007
GrantedMay 14, 2008
Term endedMarch 23, 2026
Application numberEP 06005944
Classification (CPC)G03F1/44 +1 more

Timeline

Timeline From EPO dates

2007200920112013201520172019202120232025Application filedMarch 23, 2006PublishedJune 20, 2007Patent grantedMay 14, 2008Term endedMarch 23, 2026

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