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European application, no grantEurope

Planar motor equipment, stage equipment, exposure equipment and device manufacturing method

EP 1788694 A1 · Applicant: NIKON CORPORATION

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

Why it's free to use

  • Filed July 13, 2005 and never granted as a European patent. Had it been granted, its 20-year term would have ended July 13, 2025.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledJuly 13, 2005
PublishedMay 23, 2007
GrantedNever granted
Term endedJuly 13, 2025
Application numberEP 05766499
Classification (CPC)G03F7/70758 +1 more

Timeline

Timeline From EPO dates

2006200820102012201420162018202020222024Application filedJuly 13, 2005PublishedMay 23, 2007Term endedJuly 13, 2025

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