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Expired European patentEurope

Systems and methods for reducing the influence of plasma-generated debris on the internal components of an euv light source

EP 1779410 B1 · Applicant: Cymer, Inc.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed July 15, 2005 and granted April 30, 2014. A European patent lasts at most 20 years from filing, so its term ended July 15, 2025.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledJuly 15, 2005
PublishedMay 2, 2007
GrantedApril 30, 2014
Term endedJuly 15, 2025
Application numberEP 05775431
Classification (CPC)G03F7/7085 +2 more

Timeline

Timeline From EPO dates

2006200820102012201420162018202020222024Application filedJuly 15, 2005PublishedMay 2, 2007Patent grantedApril 30, 2014Term endedJuly 15, 2025

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

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Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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