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Expired European patentEurope

Measuring method, measuring equipment, exposing method and exposing equipment

EP 1755152 B1 · Applicant: NIKON CORPORATION

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed April 20, 2005 and granted February 24, 2016. A European patent lasts at most 20 years from filing, so its term ended April 20, 2025.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledApril 20, 2005
PublishedFebruary 21, 2007
GrantedFebruary 24, 2016
Term endedApril 20, 2025
Application numberEP 05734605
Classification (CPC)G03F9/7003 +2 more

Timeline

Timeline From EPO dates

2006200820102012201420162018202020222024Application filedApril 20, 2005PublishedFeb 21, 2007Patent grantedFeb 24, 2016Term endedApril 20, 2025

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

Everything on this page comes from the EPO record linked above. EPO data used under CC BY 4.0.