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Expired European patentEurope

Optical element unit for exposure processes

EP 1735666 B1 · Applicant: Carl Zeiss SMT AG

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed April 13, 2005 and granted November 11, 2009. A European patent lasts at most 20 years from filing, so its term ended April 13, 2025.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledApril 13, 2005
PublishedDecember 27, 2006
GrantedNovember 11, 2009
Term endedApril 13, 2025
Application numberEP 05739919
Classification (CPC)G03F7/70341 +2 more

Timeline

Timeline From EPO dates

2006200820102012201420162018202020222024Application filedApril 13, 2005PublishedDec 27, 2006Patent grantedNov 11, 2009Term endedApril 13, 2025

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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