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Expired European patentEurope

Vertical heat treatment system and method for transferring substrate

EP 1734564 B1 · Applicant: TOKYO ELECTRON LIMITED

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed August 23, 2001 and granted October 8, 2008. A European patent lasts at most 20 years from filing, so its term ended August 23, 2021.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledAugust 23, 2001
PublishedDecember 20, 2006
GrantedOctober 8, 2008
Term endedAugust 23, 2021
Application numberEP 06076596
Classification (CPC)H10P72/3411 +2 more

Timeline

Timeline From EPO dates

2002200420062008201020122014201620182020Application filedAug 23, 2001PublishedDec 20, 2006Patent grantedOct 8, 2008Term endedAug 23, 2021

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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