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Expired European patentEurope

Schedule control method in spin etching and spin etching system

EP 1729332 B1 · Applicant: Mimasu Semiconductor Industry Co., Ltd.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed March 22, 2004 and granted October 12, 2016. A European patent lasts at most 20 years from filing, so its term ended March 22, 2024.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledMarch 22, 2004
PublishedDecember 6, 2006
GrantedOctober 12, 2016
Term endedMarch 22, 2024
Application numberEP 04722390
Classification (CPC)H10P74/23

Timeline

Timeline From EPO dates

2005200720092011201320152017201920212023Application filedMarch 22, 2004PublishedDec 6, 2006Patent grantedOct 12, 2016Term endedMarch 22, 2024

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

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Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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