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Expired European patentEurope

Method for forming thin silicon nitride layers on the surface of substrates

EP 1727925 B1 · Applicant: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed March 22, 2005 and granted August 4, 2010. A European patent lasts at most 20 years from filing, so its term ended March 22, 2025.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledMarch 22, 2005
PublishedDecember 6, 2006
GrantedAugust 4, 2010
Term endedMarch 22, 2025
Application numberEP 05736348
Classification (CPC)C23C16/45519 +2 more

Timeline

Timeline From EPO dates

2006200820102012201420162018202020222024Application filedMarch 22, 2005PublishedDec 6, 2006Patent grantedAug 4, 2010Term endedMarch 22, 2025

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

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