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European application, no grantEurope

System, method and apparatus for self-cleaning dry etch

EP 1725344 A2 · Applicant: LAM RESEARCH CORPORATION

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed December 30, 2004 and never granted as a European patent. Had it been granted, its 20-year term would have ended December 30, 2024.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledDecember 30, 2004
PublishedNovember 29, 2006
GrantedNever granted
Term endedDecember 30, 2024
Application numberEP 04815901
Classification (CPC)H10P50/267 +2 more

Timeline

Timeline From EPO dates

2005200720092011201320152017201920212023Application filedDec 30, 2004PublishedNov 29, 2006Term endedDec 30, 2024

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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