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Expired European patentEurope

Compositons and processes for immersion lithography

EP 1720072 B1 · Applicant: Rohm and Haas Electronic Materials, L.L.C.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed April 27, 2006 and granted June 5, 2019. A European patent lasts at most 20 years from filing, so its term ended April 27, 2026.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledApril 27, 2006
PublishedNovember 8, 2006
GrantedJune 5, 2019
Term endedApril 27, 2026
Application numberEP 06252260
Classification (CPC)G03F7/0046 +2 more

Timeline

Timeline From EPO dates

2007200920112013201520172019202120232025Application filedApril 27, 2006PublishedNov 8, 2006Patent grantedJune 5, 2019Term endedApril 27, 2026

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

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Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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