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Particle inspection apparatus and method, exposure apparatus, and device manufacturing method

EP 1715329 A1 · Applicant: CANON KABUSHIKI KAISHA

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed February 17, 2006 and never granted as a European patent. Had it been granted, its 20-year term would have ended February 17, 2026.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledFebruary 17, 2006
PublishedOctober 25, 2006
GrantedNever granted
Term endedFebruary 17, 2026
Application numberEP 06003289
Classification (CPC)G03F1/62 +2 more

Timeline

Timeline From EPO dates

2007200920112013201520172019202120232025Application filedFeb 17, 2006PublishedOct 25, 2006Term endedFeb 17, 2026

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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