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Expired European patentEurope

Exposure apparatus and device manufacturing method

EP 1713114 B1 · Applicant: Nikon Corporation

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed January 28, 2005 and granted September 19, 2018. A European patent lasts at most 20 years from filing, so its term ended January 28, 2025.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledJanuary 28, 2005
PublishedOctober 18, 2006
GrantedSeptember 19, 2018
Term endedJanuary 28, 2025
Application numberEP 05709451
Classification (CPC)G03F7/70341 +2 more

Timeline

Timeline From EPO dates

2006200820102012201420162018202020222024Application filedJan 28, 2005PublishedOct 18, 2006Patent grantedSep 19, 2018Term endedJan 28, 2025

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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