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Expired European patentEurope

Temperature controlled hot edge ring assembly for reducing plasma reactor etch rate drift

EP 1706898 B1 · Applicant: LAM RESEARCH CORPORATION

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed December 10, 2004 and granted September 20, 2017. A European patent lasts at most 20 years from filing, so its term ended December 10, 2024.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledDecember 10, 2004
PublishedOctober 4, 2006
GrantedSeptember 20, 2017
Term endedDecember 10, 2024
Application numberEP 04818010
Classification (CPC)H10P72/0421 +2 more

Timeline

Timeline From EPO dates

2005200720092011201320152017201920212023Application filedDec 10, 2004PublishedOct 4, 2006Patent grantedSep 20, 2017Term endedDec 10, 2024

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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