Patent Yard Sign in
Expired European patentEurope

Method of making a mems electrostatic chuck

EP 1678752 B1 · Applicant: Axcelis Technologies, Inc.

EPO PDF

Overview

The published document from the EPO: abstract, claims, description and drawings. Open it full size

Read the whole patent

Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

Google PatentsEPO PDF

Why it's free to use

  • Filed October 28, 2004 and granted May 23, 2007. A European patent lasts at most 20 years from filing, so its term ended October 28, 2024.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledOctober 28, 2004
PublishedJuly 12, 2006
GrantedMay 23, 2007
Term endedOctober 28, 2024
Application numberEP 04796693
Classification (CPC)H10P72/722

Timeline

Timeline From EPO dates

2005200720092011201320152017201920212023Application filedOct 28, 2004PublishedJuly 12, 2006Patent grantedMay 23, 2007Term endedOct 28, 2024

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

Everything on this page comes from the EPO record linked above. EPO data used under CC BY 4.0.