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Charged particle beam apparatus, method of displaying sample image, and method of measuring image shift sensitivity

EP 1672672 A2 · Applicant: Hitachi High-Technologies Corporation

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

Why it's free to use

  • Filed December 16, 2005 and never granted as a European patent. Had it been granted, its 20-year term would have ended December 16, 2025.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledDecember 16, 2005
PublishedJune 21, 2006
GrantedNever granted
Term endedDecember 16, 2025
Application numberEP 05027647
Classification (CPC)H01J37/222

Timeline

Timeline From EPO dates

2006200820102012201420162018202020222024Application filedDec 16, 2005PublishedJune 21, 2006Term endedDec 16, 2025

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