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Data generating system, patterning data generating apparatus, method of generating patterning data and storage medium carrying patterning data

EP 1669801 A2 · Applicant: Dainippon Screen Mfg. Co., Ltd.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed November 23, 2005 and never granted as a European patent. Had it been granted, its 20-year term would have ended November 23, 2025.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledNovember 23, 2005
PublishedJune 14, 2006
GrantedNever granted
Term endedNovember 23, 2025
Application numberEP 05025544
Classification (CPC)G03F1/68

Timeline

Timeline From EPO dates

2006200820102012201420162018202020222024Application filedNov 23, 2005PublishedJune 14, 2006Term endedNov 23, 2025

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

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Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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