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Expired European patentEurope

Exposure method as well as projection exposure system for carrying out the method

EP 1668420 B1 · Applicant: Carl Zeiss SMT AG

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed October 29, 2003 and granted May 21, 2008. A European patent lasts at most 20 years from filing, so its term ended October 29, 2023.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledOctober 29, 2003
PublishedJune 14, 2006
GrantedMay 21, 2008
Term endedOctober 29, 2023
Application numberEP 03808273
Classification (CPC)G03F7/70225 +2 more

Timeline

Timeline From EPO dates

2004200620082010201220142016201820202022Application filedOct 29, 2003PublishedJune 14, 2006Patent grantedMay 21, 2008Term endedOct 29, 2023

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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