Patent Yard Sign in
Expired European patentEurope

Lithographic apparatus and device manufacturing method

EP 1666973 B1 · Applicant: ASML Netherlands B.V.

EPO PDF

Overview

The published document from the EPO: abstract, claims, description and drawings. Open it full size

Read the whole patent

Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

Google PatentsEPO PDF

Why it's free to use

  • Filed November 22, 2005 and granted April 28, 2010. A European patent lasts at most 20 years from filing, so its term ended November 22, 2025.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledNovember 22, 2005
PublishedJune 7, 2006
GrantedApril 28, 2010
Term endedNovember 22, 2025
Application numberEP 05257182
Classification (CPC)G03F7/70341

Timeline

Timeline From EPO dates

2006200820102012201420162018202020222024Application filedNov 22, 2005PublishedJune 7, 2006Patent grantedApril 28, 2010Term endedNov 22, 2025

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

Everything on this page comes from the EPO record linked above. EPO data used under CC BY 4.0.