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Expired European patentEurope

Ion beam irradiation system for ion implantation

EP 1662543 B1 · Applicant: SEN Corporation, an SHI and Axcelis Company

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed August 31, 2005 and granted March 14, 2012. A European patent lasts at most 20 years from filing, so its term ended August 31, 2025.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledAugust 31, 2005
PublishedMay 31, 2006
GrantedMarch 14, 2012
Term endedAugust 31, 2025
Application numberEP 05255331
Classification (CPC)H01J37/023 +2 more

Timeline

Timeline From EPO dates

2006200820102012201420162018202020222024Application filedAug 31, 2005PublishedMay 31, 2006Patent grantedMarch 14, 2012Term endedAug 31, 2025

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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