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Expired European patentEurope

Chamber and method for wafer processing

EP 1609174 B1 · Applicant: LAM RESEARCH CORPORATION

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed March 23, 2004 and granted November 30, 2011. A European patent lasts at most 20 years from filing, so its term ended March 23, 2024.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledMarch 23, 2004
PublishedDecember 28, 2005
GrantedNovember 30, 2011
Term endedMarch 23, 2024
Application numberEP 04758931
Classification (CPC)H10P72/3308 +2 more

Timeline

Timeline From EPO dates

2005200720092011201320152017201920212023Application filedMarch 23, 2004PublishedDec 28, 2005Patent grantedNov 30, 2011Term endedMarch 23, 2024

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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