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Supercritical carbon dioxide/chemical formulation for removal of photoresists

EP 1592520 A2 · Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.

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Overview

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed October 27, 2003 and never granted as a European patent. Had it been granted, its 20-year term would have ended October 27, 2023.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledOctober 27, 2003
PublishedNovember 9, 2005
GrantedNever granted
Term endedOctober 27, 2023
Application numberEP 03779250
Classification (CPC)C11D7/02 +2 more

Timeline

Timeline From EPO dates

2004200620082010201220142016201820202022Application filedOct 27, 2003PublishedNov 9, 2005Term endedOct 27, 2023

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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