Patent Yard Sign in
Expired European patentEurope

Electron beam processing for mask repair

EP 1586007 B1 · Applicant: FEI COMPANY

EPO PDF

Overview

The published document from the EPO: abstract, claims, description and drawings. Open it full size

Read the whole patent

Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

Google PatentsEPO PDF

Why it's free to use

  • Filed January 16, 2004 and granted April 11, 2012. A European patent lasts at most 20 years from filing, so its term ended January 16, 2024.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledJanuary 16, 2004
PublishedOctober 19, 2005
GrantedApril 11, 2012
Term endedJanuary 16, 2024
Application numberEP 04702994
Classification (CPC)G03F1/74

Timeline

Timeline From EPO dates

2005200720092011201320152017201920212023Application filedJan 16, 2004PublishedOct 19, 2005Patent grantedApril 11, 2012Term endedJan 16, 2024

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

Everything on this page comes from the EPO record linked above. EPO data used under CC BY 4.0.