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Expired European patentEurope

Lithographic apparatus and device manufacturing method

EP 1582935 B1 · Applicant: ASML Netherlands B.V.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed March 31, 2005 and granted September 27, 2006. A European patent lasts at most 20 years from filing, so its term ended March 31, 2025.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledMarch 31, 2005
PublishedOctober 5, 2005
GrantedSeptember 27, 2006
Term endedMarch 31, 2025
Application numberEP 05252043
Classification (CPC)G03F7/70691 +1 more

Timeline

Timeline From EPO dates

2006200820102012201420162018202020222024Application filedMarch 31, 2005PublishedOct 5, 2005Patent grantedSep 27, 2006Term endedMarch 31, 2025

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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