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Dissolution inhibitors in photoresist compositions for microlithography

EP 1500976 A1 · Applicant: DSM IP Assets B.V.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed July 23, 2003 and never granted as a European patent. Had it been granted, its 20-year term would have ended July 23, 2023.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledJuly 23, 2003
PublishedJanuary 26, 2005
GrantedNever granted
Term endedJuly 23, 2023
Application numberEP 03102269
Classification (CPC)G03F7/0045 +2 more

Timeline

Timeline From EPO dates

2004200620082010201220142016201820202022Application filedJuly 23, 2003PublishedJan 26, 2005Term endedJuly 23, 2023

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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