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Expired European patentEurope

Lithographic projection apparatus and device manufacturing method

EP 1494075 B1 · Applicant: ASML Netherlands B.V.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed June 30, 2003 and granted June 25, 2008. A European patent lasts at most 20 years from filing, so its term ended June 30, 2023.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledJune 30, 2003
PublishedJanuary 5, 2005
GrantedJune 25, 2008
Term endedJune 30, 2023
Application numberEP 03254143
Classification (CPC)G03F7/70341 +1 more

Timeline

Timeline From EPO dates

2004200620082010201220142016201820202022Application filedJune 30, 2003PublishedJan 5, 2005Patent grantedJune 25, 2008Term endedJune 30, 2023

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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