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Expired European patentEurope

Lithographic apparatus and device manufacturing method

EP 1372040 B1 · Applicant: ASML Netherlands B.V.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed June 4, 2003 and granted March 5, 2008. A European patent lasts at most 20 years from filing, so its term ended June 4, 2023.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledJune 4, 2003
PublishedDecember 17, 2003
GrantedMarch 5, 2008
Term endedJune 4, 2023
Application numberEP 03253494
Classification (CPC)G03F7/70425 +2 more

Timeline

Timeline From EPO dates

2004200620082010201220142016201820202022Application filedJune 4, 2003PublishedDec 17, 2003Patent grantedMarch 5, 2008Term endedJune 4, 2023

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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