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Expired European patentEurope

Reflective projection lens for EUV photolithography

EP 1282011 B1 · Applicant: CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed July 26, 2002 and granted November 22, 2006. A European patent lasts at most 20 years from filing, so its term ended July 26, 2022.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledJuly 26, 2002
PublishedFebruary 5, 2003
GrantedNovember 22, 2006
Term endedJuly 26, 2022
Application numberEP 02016693
Classification (CPC)G02B5/10 +2 more

Timeline

Timeline From EPO dates

2003200520072009201120132015201720192021Application filedJuly 26, 2002PublishedFeb 5, 2003Patent grantedNov 22, 2006Term endedJuly 26, 2022

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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