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Expired European patentEurope

Uv-enhanced silylation process to increase etch resistance of ultra thin resists

EP 1279072 B1 · Applicant: ADVANCED MICRO DEVICES INC.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed April 19, 2001 and granted October 6, 2004. A European patent lasts at most 20 years from filing, so its term ended April 19, 2021.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledApril 19, 2001
PublishedJanuary 29, 2003
GrantedOctober 6, 2004
Term endedApril 19, 2021
Application numberEP 01927263
Classification (CPC)H10P50/73 +2 more

Timeline

Timeline From EPO dates

2002200420062008201020122014201620182020Application filedApril 19, 2001PublishedJan 29, 2003Patent grantedOct 6, 2004Term endedApril 19, 2021

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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