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Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module

EP 1277233 A2 · Applicant: Tokyo Electron Corporation

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed April 24, 2001 and never granted as a European patent. Had it been granted, its 20-year term would have ended April 24, 2021.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledApril 24, 2001
PublishedJanuary 22, 2003
GrantedNever granted
Term endedApril 24, 2021
Application numberEP 01928842
Classification (CPC)H10P72/0406 +2 more

Timeline

Timeline From EPO dates

2002200420062008201020122014201620182020Application filedApril 24, 2001PublishedJan 22, 2003Term endedApril 24, 2021

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

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Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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