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Expired European patentEurope

Method and apparatus for providing uniform gas delivery to substrates in cvd and pecvd processes

EP 1274875 B1 · Applicant: GENUS, INC.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed July 6, 2000 and granted November 16, 2005. A European patent lasts at most 20 years from filing, so its term ended July 6, 2020.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by January 6, 2026.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledJuly 6, 2000
PublishedJanuary 15, 2003
GrantedNovember 16, 2005
Term endedJuly 6, 2020
Application numberEP 00955920
Classification (CPC)C23C16/45574 +2 more

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

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Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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