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Expired European patentEurope

A device and method for suppressing space charge induced abberations in charged-particle projection lithography systems

EP 1199739 B1 · Applicant: Agere Systems Guardian Corporation

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed October 18, 2001 and granted December 23, 2009. A European patent lasts at most 20 years from filing, so its term ended October 18, 2021.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledOctober 18, 2001
PublishedApril 24, 2002
GrantedDecember 23, 2009
Term endedOctober 18, 2021
Application numberEP 01308857
Classification (CPC)H01J37/3174 +2 more

Timeline

Timeline From EPO dates

2002200420062008201020122014201620182020Application filedOct 18, 2001PublishedApril 24, 2002Patent grantedDec 23, 2009Term endedOct 18, 2021

Sources & verification

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Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

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