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Expired European patentEurope

Plasma treatment of thermal cvd tan films from tantalum halide precursors

EP 1192292 B1 · Applicant: Tokyo Electron Limited

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed April 26, 2000 and granted August 13, 2003. A European patent lasts at most 20 years from filing, so its term ended April 26, 2020.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by October 26, 2025.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledApril 26, 2000
PublishedApril 3, 2002
GrantedAugust 13, 2003
Term endedApril 26, 2020
Application numberEP 00928417
Classification (CPC)H10W20/033 +2 more

Timeline

Timeline From EPO dates

2001200320052007200920112013201520172019Application filedApril 26, 2000PublishedApril 3, 2002Patent grantedAug 13, 2003Term endedApril 26, 2020

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

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