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Expired European patentEurope

Wafer pretreatment to decrease the deposition rate of silicon dioxide on silicon nitride in comparison to its deposition rate on a silicon substrate

EP 1178528 B1 · Applicant: Applied Materials, Inc.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed July 31, 2001 and granted January 11, 2012. A European patent lasts at most 20 years from filing, so its term ended July 31, 2021.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledJuly 31, 2001
PublishedFebruary 6, 2002
GrantedJanuary 11, 2012
Term endedJuly 31, 2021
Application numberEP 01306570
Classification (CPC)C23C16/02 +2 more

Timeline

Timeline From EPO dates

2002200420062008201020122014201620182020Application filedJuly 31, 2001PublishedFeb 6, 2002Patent grantedJan 11, 2012Term endedJuly 31, 2021

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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