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Expired European patentEurope

Lithographic apparatus, device manufacturing method, and device manufactured thereby

EP 1170635 B1 · Applicant: ASML Netherlands B.V.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed July 3, 2001 and granted June 7, 2006. A European patent lasts at most 20 years from filing, so its term ended July 3, 2021.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledJuly 3, 2001
PublishedJanuary 9, 2002
GrantedJune 7, 2006
Term endedJuly 3, 2021
Application numberEP 01305740
Classification (CPC)G03F7/70066 +1 more

Timeline

Timeline From EPO dates

2002200420062008201020122014201620182020Application filedJuly 3, 2001PublishedJan 9, 2002Patent grantedJune 7, 2006Term endedJuly 3, 2021

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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