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Expired European patentEurope

Line with compensation using spatial variations in partial coherence

EP 1168083 B1 · Applicant: ASML Holding N.V.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed June 20, 2001 and granted March 7, 2007. A European patent lasts at most 20 years from filing, so its term ended June 20, 2021.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledJune 20, 2001
PublishedJanuary 2, 2002
GrantedMarch 7, 2007
Term endedJune 20, 2021
Application numberEP 01115009
Classification (CPC)G03F7/70125

Timeline

Timeline From EPO dates

2002200420062008201020122014201620182020Application filedJune 20, 2001PublishedJan 2, 2002Patent grantedMarch 7, 2007Term endedJune 20, 2021

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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