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Expired European patentEurope

Plasma processor with coil having variable rf coupling

EP 1166321 B1 · Applicant: LAM RESEARCH CORPORATION

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Overview

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed February 10, 2000 and granted April 6, 2011. A European patent lasts at most 20 years from filing, so its term ended February 10, 2020.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by August 10, 2025.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledFebruary 10, 2000
PublishedJanuary 2, 2002
GrantedApril 6, 2011
Term endedFebruary 10, 2020
Application numberEP 00908551
Classification (CPC)H01J37/321 +2 more

Timeline

Timeline From EPO dates

2001200320052007200920112013201520172019Application filedFeb 10, 2000PublishedJan 2, 2002Patent grantedApril 6, 2011Term endedFeb 10, 2020

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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